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Diffusion Engineering by Carbon in Silicon
Goesele, Ulrich, Laveant, Pierre, Scholz, Rene, Engler, Norbert, Werner, PeterVolume:
610
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-610-b7.11
Date:
January, 2000
File:
PDF, 273 KB
english, 2000