The Effect of Wafer Shape on Slurry Film Thickness and Friction Coefficients in Chemical Mechanical Planarization
Lu, Joseph, Coppeta, Jonathan, Rogers, Chris, Manno, Vincent P., Racz, Livia, Philipossian, Ara, Moinpour, Mansour, Kaufmanc, FrankVolume:
613
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-613-e1.2.1
Date:
January, 2000
File:
PDF, 140 KB
english, 2000