The Effect of Wafer Shape on Slurry Film Thickness and...

The Effect of Wafer Shape on Slurry Film Thickness and Friction Coefficients in Chemical Mechanical Planarization

Lu, Joseph, Coppeta, Jonathan, Rogers, Chris, Manno, Vincent P., Racz, Livia, Philipossian, Ara, Moinpour, Mansour, Kaufmanc, Frank
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
613
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-613-e1.2.1
Date:
January, 2000
File:
PDF, 140 KB
english, 2000
Conversion to is in progress
Conversion to is failed