Simple and Low Cost Patterning Process for Sputtered...

Simple and Low Cost Patterning Process for Sputtered Pb(Zr,Ti)O3 Thin Films and Electrodes for Membrane-Based Microsystems Applications

Millon, Cyril, Malhaire, Christophe, Defaÿ, Emmanuel, Barbier, Daniel
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
657
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-657-ee5.29
Date:
January, 2000
File:
PDF, 261 KB
english, 2000
Conversion to is in progress
Conversion to is failed