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Simple and Low Cost Patterning Process for Sputtered Pb(Zr,Ti)O3 Thin Films and Electrodes for Membrane-Based Microsystems Applications
Millon, Cyril, Malhaire, Christophe, Defaÿ, Emmanuel, Barbier, DanielVolume:
657
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-657-ee5.29
Date:
January, 2000
File:
PDF, 261 KB
english, 2000