The Study of the Formation of Thin SOI Structure by SIMOX...

MRS Proceedings 2001 / 1 Vol. 686

The Study of the Formation of Thin SOI Structure by SIMOX with Water Plasma

Jing, Chen, Meng, Chen, Xiang, Wang, Yemin, Dong, Zhihong, Zheng, Xi, Wang
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Volume:
686
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-686-a2.3
Date:
January, 2001
File:
PDF, 343 KB
english, 2001
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