Residual Ion Implantation Damage at Source/Drain Junctions...

MRS Proceedings 2002 / 1 Vol. 715

Residual Ion Implantation Damage at Source/Drain Junctions of Excimer Laser Annealed Polycrystalline Silicon Thin Film Transistor

Park, Kee-Chan, Kim, Jae-Shin, Nam, Woo-Jin, Han, Min-Koo
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Volume:
715
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-715-a7.6
Date:
January, 2002
File:
PDF, 1.22 MB
english, 2002
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