FIB-TEM Characterization of Locally Restricted Implantation...

MRS Proceedings 2002 / 1 Vol. 738

FIB-TEM Characterization of Locally Restricted Implantation Damage

Wanzenboeck, Heinz D., Harasek, Stefan, Brezna, Wolfgang, Lugstein, Alois, Langfischer, Helmut, Bertagnolli, Emmerich, Grabner, Ulf, Hammer, Gerold, Pongratz, Peter
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Volume:
738
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-738-g7.14
Date:
January, 2002
File:
PDF, 632 KB
english, 2002
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