Nanoscale Control of Friction and Chemistry on Silicon...

Nanoscale Control of Friction and Chemistry on Silicon Surfaces

Baluch, Andrew S., Basu, Rajiv, Guisinger, Nathan P., Reagan Kinser, C., Kramer, Donald E., Such, Matthew W., Hersam, Mark C.
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Volume:
750
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-750-y9.1
Date:
January, 2002
File:
PDF, 719 KB
english, 2002
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