Effect of Polymer Substrates on Nano Scale Hot Embossing

MRS Proceedings 2003 / 1 Vol. 782

Effect of Polymer Substrates on Nano Scale Hot Embossing

Lee, Jin-Hyung, Lim, Hyun-Woo, Park, Jin-Goo, Lee, Eun-Kyu, Kim, Yangsun
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Volume:
782
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-782-a5.50
Date:
January, 2003
File:
PDF, 191 KB
english, 2003
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