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Investigation of Mechanical Integrity and its effect on Polishing for Novel Polyurethane Polishing Pad
Zantye, Parshuram, Mudhivarthi, S., Sikder, A. K., Kumar, Ashok, Ostapenko, S., Harmon, JulieVolume:
816
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-816-k4.7
Date:
January, 2004
File:
PDF, 204 KB
english, 2004