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Effects of the Subsequent Ion Irradiation on the Formation Process of β-SiC from Si-C Mixtures Fabricated on Si by Ion Implantation
Kimura, Tadamasa, Yamaguchi, Hiroyuki, Yugo, Shigemi, Adachi, YoshioVolume:
97
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-97-289
Date:
January, 1987
File:
PDF, 361 KB
english, 1987