Depth-Dependent Imaging of Individual Dopant Atoms in...

Microscopy and Microanalysis 2004 / 4 Vol. 10; Iss. 2

Depth-Dependent Imaging of Individual Dopant Atoms in Silicon

Voyles, P.M., Muller, D.A., Kirkland, E.J.
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927604040012
Date:
April, 2004
File:
PDF, 2.68 MB
english, 2004
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