A 4-degrees-of-freedom microrobot with nanometer resolution

A 4-degrees-of-freedom microrobot with nanometer resolution

Breguet, J.-M., Renaud, Ph.
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Volume:
14
Language:
english
Journal:
Robotica
DOI:
10.1017/s026357470001910x
Date:
March, 1996
File:
PDF, 373 KB
english, 1996
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