Acid generation and deprotecting reaction by...

Acid generation and deprotecting reaction by diphenyliodonium 9,10-dimethoxyanthracene-2-sulfonate in a novolak positive photoresist based on chemical amplification

Kazuhiko Naitoh, Tsuguo Yamaoka, Akira Umehara
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3
Year:
1992
Language:
english
Pages:
7
DOI:
10.1002/pat.1992.220030304
File:
PDF, 738 KB
english, 1992
Conversion to is in progress
Conversion to is failed