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Acid generation and deprotecting reaction by diphenyliodonium 9,10-dimethoxyanthracene-2-sulfonate in a novolak positive photoresist based on chemical amplification
Kazuhiko Naitoh, Tsuguo Yamaoka, Akira UmeharaVolume:
3
Year:
1992
Language:
english
Pages:
7
DOI:
10.1002/pat.1992.220030304
File:
PDF, 738 KB
english, 1992