Negative-type photosensitive polyimide precursors developable with aqueous alkaline solutions
H. Kikkawa, F. Shoji, J. Tanaka, F. Kataoka, H. SatouVolume:
4
Year:
1993
Language:
english
Pages:
9
DOI:
10.1002/pat.1993.220040407
File:
PDF, 2.03 MB
english, 1993