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Photoreactive fluorinated polyimide protected by tetrahydropyranyl (THP) group based on chemical amplification: Acid generation in polyimide film and lithographic properties
Kazuhiko Naitoh, Kazuhisa Ishii, Tsuguo Yamaoka, Toshihiko OmoteVolume:
4
Year:
1993
Language:
english
Pages:
8
DOI:
10.1002/pat.1993.220040410
File:
PDF, 1.72 MB
english, 1993