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Mapping of Process-Induced Dopant Redistributions by Electron Holography
Rau, Wolf-Dieter, Orchowski, AlexanderVolume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604040036
Date:
August, 2004
File:
PDF, 2.03 MB
english, 2004