Electron Beam Induced Charging of Focused Ion Beam Milled...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

Electron Beam Induced Charging of Focused Ion Beam Milled Semiconductor Transistors Examined Using Electron Holography

Kasama, Takeshi, Dunin-Borkowski, Rafal E, Newcomb, Simon B, McCartney, Martha R
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604883132
Date:
August, 2004
File:
PDF, 337 KB
english, 2004
Conversion to is in progress
Conversion to is failed