Local Lattice Parameter Determination of Strained Areas of...

Local Lattice Parameter Determination of Strained Areas of Semiconductors Using CBED

Akaogi, Takayuki, Tsuda, Kenji, Terauchi, Masami, Tanaka, Michiyoshi
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604883727
Date:
August, 2004
File:
PDF, 499 KB
english, 2004
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