Detection of Characteristic Signals from As-Doped (less...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

Detection of Characteristic Signals from As-Doped (less than 1 at.%) Regions of Silicon by Transmission Electron Microscopy and Convergent-beam Electron Diffraction

Terauchi, Masami, Tsuda, Kenji, Mitsuishi, Hajime, Kawamura, Kazuo
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604883958
Date:
August, 2004
File:
PDF, 324 KB
english, 2004
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