ELNES and EDS Mapping in HfOxNy Thin Films and AlN/TiN...

Microscopy and Microanalysis 2004 / 8 Vol. 10; Iss. S02

ELNES and EDS Mapping in HfOxNy Thin Films and AlN/TiN Superlattices

Couillard, Martin, Lee, M-S, Landheer, Dolf, Pankov, Vladimir V., Prince, Robert H., Botton, Gianluigi A.
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Volume:
10
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927604887634
Date:
August, 2004
File:
PDF, 367 KB
english, 2004
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