Searching Ultimate Nanometrology for AlOx Thickness in...

Microscopy and Microanalysis 2005 / 10 Vol. 11; Iss. 5

Searching Ultimate Nanometrology for AlOx Thickness in Magnetic Tunnel Junction by Analytical Electron Microscopy and X-ray Reflectometry

Song, Se Ahn, Hirano, Tatsumi, Park, Jong Bong, Kaji, Kazutoshi, Kim, Ki Hong, Terada, Shohei
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Volume:
11
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927605050580
Date:
October, 2005
File:
PDF, 1.04 MB
english, 2005
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