Electron Holography with Variable Magnification for...

Microscopy and Microanalysis 2005 / 8 Vol. 11; Iss. S02

Electron Holography with Variable Magnification for Semiconductor Device Characterization

Wang, Y-Y, Domenicucci, A, Kawasaki, M, Bruley, J, Gribelyuk, M, Gaudiello, J
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Volume:
11
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927605500035
Date:
August, 2005
File:
PDF, 285 KB
english, 2005
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