HAADF Imaging and Low-Loss EELS Investigation of HfO2/TiN...

Microscopy and Microanalysis 2005 / 8 Vol. 11; Iss. S02

HAADF Imaging and Low-Loss EELS Investigation of HfO2/TiN Interfaces in High-k Gate Stacks

Agustin, M P, Fonseca, L R C, Hooker, J H, Stemmer, S
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927605504458
Date:
August, 2005
File:
PDF, 1.32 MB
english, 2005
Conversion to is in progress
Conversion to is failed