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Sub-50nm Metrology Control in the Fabrication Processing of Quartz-based Nanoimprint Templates by Variable Pressure SEM Imaging
Drouin, D, Lavallée, E, Cloutier, M, Mun, L K, Beauvais, J, Griffin, BVolume:
11
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927605510043
Date:
August, 2005
File:
PDF, 439 KB
english, 2005