Mechanical Behavior of the Patterned Copper Lines
Verdyan, A, Soifer, Y, Karpovski, M, Tzukernik, A, Kazakevich, M, Rabkin, EVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606061368
Date:
August, 2006
File:
PDF, 272 KB
english, 2006