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Local Stress Assessment in Patterned Interlayer Dielectric Films using Cathodoluminescence Spectroscopy
Kakinuma, S, Kodera, M, Nishikata, K, Aoyama, J, Saijo, Y, Pezzotti, GVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606061976
Date:
August, 2006
File:
PDF, 865 KB
english, 2006