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XAS and TEM Study of the TiN Thin Films Grown by the Pulsed DC Sputtering Technique Assisted by Balanced Magnetron.
Moller, JA Duarte, Ponce, HE Esparza, Valenzuela, C GonzálezVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606062179
Date:
August, 2006
File:
PDF, 172 KB
english, 2006