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Improvement of TEM-EELS and Its Application for Materials in Semiconductor Devices
Kimoto, K, Ishizuka, K, Matsui, YVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606062349
Date:
August, 2006
File:
PDF, 724 KB
english, 2006