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Calibration and Test Structures for Nanometrology
Kim, J, Deo, S, Jalhadi, K, Lee, S-Y, Joy, DVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606062787
Date:
August, 2006
File:
PDF, 112 KB
english, 2006