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Surface Rippling & Ion Etch Yields of Diamond Using a Focused Ion Beam: With or without Enhanced-Chemistry, Aspect Ratio Regulates Ion Etching
MoberlyChan, WJ, Felter, T, Wall, MVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606064129
Date:
August, 2006
File:
PDF, 3.99 MB
english, 2006