![](/img/cover-not-exists.png)
Influence of Beam Energy and Probe Size on the Process of Electron-Beam-Induced Deposition
Liu, Z-Q, Mitsuishi, K, Furuya, KVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760606510x
Date:
August, 2006
File:
PDF, 1.77 MB
english, 2006