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Investigations of Dopant Clustering in Si via Radial Distribution Function
Thompson, K, Brian, G, Gerstl, SS A, Sebastian, JVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606065391
Date:
August, 2006
File:
PDF, 110 KB
english, 2006