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Optical Interferometer Microscope for Monitoring and Control of Focused Ion Beam Processes
Adams, DP, Sinclair, MB, Mayer, TM, Vasile, MJ, Sweatt, WCVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606065597
Date:
August, 2006
File:
PDF, 274 KB
english, 2006