Effects of Beam and Scan Parameters on 3-Dimensional Carbon Structure Growth Using Electron Beam Induced Chemistry
Garetto, AD, Garcia, R, Griffis, DP, Russell, PEVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606065950
Date:
August, 2006
File:
PDF, 310 KB
english, 2006