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Surface Roughness Instabilities in Low-Angle Ion Milling
Barnard, AW, Hyun, JK, Grazul, JL, Muller, DAVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606067201
Date:
August, 2006
File:
PDF, 606 KB
english, 2006