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Demonstration of Pick and Place Assembly for Scaled MEMS Devices
Jeon, J, Gory, I, Skidmore, G, Kim, MJ, Gnade, BEVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760606884x
Date:
August, 2006
File:
PDF, 512 KB
english, 2006