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Measurement of k-value in Semiconductor Structures
Potapov, PL, Engelmann, H-J, Zschech, EVolume:
12
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927606069868
Date:
August, 2006
File:
PDF, 479 KB
english, 2006