Resolution and Contrast in Dual Beam Imaging of Three Dimensional Structures of Microelectronic Devices
Evertsen, J, Lifshin, EVolume:
13
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927607074168
Date:
August, 2007
File:
PDF, 976 KB
english, 2007