Three Dimensional Compositional Characterization of...

Microscopy and Microanalysis 2007 / 8 Vol. 13; Iss. S02

Three Dimensional Compositional Characterization of Dielectric Films with LEAP Tomography

Ulfig, R, Thompson, K, Alvis, R, Larson, DJ, Ronsheim, P
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927607076568
Date:
August, 2007
File:
PDF, 344 KB
english, 2007
Conversion to is in progress
Conversion to is failed