In-situ Observation of Structural Change and Failure Detection for Electrically Active Devices in TEM
Kim, Y-W, Ko, D-S, Kim, S-D, Li, XS, Park, GS, Kim, YK, Park, CGVolume:
13
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760707732x
Date:
August, 2007
File:
PDF, 337 KB
english, 2007