![](/img/cover-not-exists.png)
Microcharacterization of Semiconductor Device Materials using Kelvin Probe Microscopy
Stevens-Kalceff, M, Sobey, T, Kruss, DVolume:
13
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927607077392
Date:
August, 2007
File:
PDF, 180 KB
english, 2007