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Integration of Functional Epitaxial Oxides into Silicon: A TEM Investigation
Bugiel, E, Fissel, A, Czernohorsky, M, Laha, A, Osten, H JVolume:
13
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927607081524
Date:
September, 2007
File:
PDF, 391 KB
english, 2007