Arsenic Segregation to Dislocation Loops in Silicon

Microscopy and Microanalysis 2008 / 8 Vol. 14; Iss. S2

Arsenic Segregation to Dislocation Loops in Silicon

Larson, DJ, Thompson, K, Alvis, RL, Lawrence, DF, Ulfig, RM, Reinhard, DA, Clifton, PH, Bunton, JH, Lenz, DR, Kelly, TF
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Volume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608083700
Date:
August, 2008
File:
PDF, 451 KB
english, 2008
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