Comparison of Zone Axes for Convergent Beam Electron Diffraction Strain Measurements of a Strained Silicon Transistor
Diercks, DR, Kaufman, MJVolume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608086959
Date:
August, 2008
File:
PDF, 220 KB
english, 2008