Use of a commercial RF plasma cleaner in eliminating adventitious carbon contamination in an XPS system
Strein, E, Allred, D, Linford, MRVolume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608087710
Date:
August, 2008
File:
PDF, 131 KB
english, 2008