OmniGIS Gas Injection System for Ion Beam Induced...

Microscopy and Microanalysis 2008 / 8 Vol. 14; Iss. S2

OmniGIS Gas Injection System for Ion Beam Induced Deposition and Etching

Leonard, DN, Dhawan, A, Russell, PE
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Volume:
14
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927608088454
Date:
August, 2008
File:
PDF, 3.37 MB
english, 2008
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