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EFTEM, EELS, and Cathodoluminescence in Si-implanted SiO2 Layers
Fitting, H-J, Kourkoutis, L Fitting, Salh, R, Schmidt, BVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609092174
Date:
July, 2009
File:
PDF, 403 KB
english, 2009