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The Dual Challenges for FIBXTEM in the Era of sub-50nm Feature Sizes
Tracy, B, Gray, J, Adem, E, Phillips, B, delRosario, A, Myers, A, Sidorov, M, Guillena, MVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609092897
Date:
July, 2009
File:
PDF, 2.09 MB
english, 2009