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Optimized Sample Preparation for the Imaging of Silicon Defects using Plan View Transmission Electron Microscopy
Wang, N, Myers, A, Sidorov, M, Koo, H, Yuan, C, Tracy, B, Li, SVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609092952
Date:
July, 2009
File:
PDF, 517 KB
english, 2009