Three-Dimensional Observation of Edge-Roughness on...

Microscopy and Microanalysis 2009 / 7 Vol. 15; Iss. S2

Three-Dimensional Observation of Edge-Roughness on Poly-Si/TiN Stacked Gate Using Three-Dimensional STEM

Ono, S, Yamane, M, Katakami, A, Yugami, J, Koguchi, M, Ogasawara, M, Miyakawa, M, Kakibayashi, H, Ohji, Y
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Volume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609092976
Date:
July, 2009
File:
PDF, 257 KB
2009
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